JPH0468537U - - Google Patents
Info
- Publication number
- JPH0468537U JPH0468537U JP11191390U JP11191390U JPH0468537U JP H0468537 U JPH0468537 U JP H0468537U JP 11191390 U JP11191390 U JP 11191390U JP 11191390 U JP11191390 U JP 11191390U JP H0468537 U JPH0468537 U JP H0468537U
- Authority
- JP
- Japan
- Prior art keywords
- gripping
- wafer cassette
- driving
- section
- driving part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11191390U JPH0468537U (en]) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11191390U JPH0468537U (en]) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468537U true JPH0468537U (en]) | 1992-06-17 |
Family
ID=31859398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11191390U Pending JPH0468537U (en]) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468537U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0870027A (ja) * | 1994-08-30 | 1996-03-12 | Canon Inc | 基板保管装置及びそれを有する半導体製造装置 |
-
1990
- 1990-10-25 JP JP11191390U patent/JPH0468537U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0870027A (ja) * | 1994-08-30 | 1996-03-12 | Canon Inc | 基板保管装置及びそれを有する半導体製造装置 |